Philo is developed especially for those customers who need a standard platform
which cane be customized to host different applications.
The machine is built with excellent materials and all parts are inserted in a
robust aluminium frame.
The model PHILO is a compact plasma cleaning system suitable for batch
operation. Typical applications are:
• Organic decontamination prior to wire bonding
• Adhesion promoter prior to moulding
• Adhesion promoter of die attach materials on substrates
• Flux removal from semiconductor packages , hybrids or automotive products
• General activation, cleaning and decontamination
• 3”, 4” ,6” and 8” wafer cleaning
