The model Vesta (Plasma Cleaning Platform) is a customizable plasma cleaning platform suitable for stand alone or inline operation. Typical applications are:

• Organic decontamination prior to wire bonding (Au, Al or Cu)
• Adhesion promoter prior to molding or Glob Top
• Adhesion promoter of die attach materials on Hybrids or PCBs
• Flux removal from semiconductor packages or automotive packages
• Activation of plastic products for Automotive and Medical applications
• General activation, cleaning and decontamination

In Line applications
Maxi product dimensions:   350 x 300 x 80 h mm

Batch applications
Maxi product dimensions:   700 x 700 x 200 h mm

Dimensions:                      1000 x 1300 x 1500h mm
Weight:                             approx. 500 Kg
Power:                              Single Phase 100-240 V 50 /60Hz, 2.5 KVA
Air:                                   Dry 3—6 bar
RF:                                   600 Watts @13.56 MHz + Auto Tuner
1 gas line standard
Exhaust port:                      NW25
CE Certified Safety covers and interlocks

Options:

• Multiple gas lines
• 1 kW RF Generator
• RF frequency from 50 kHz to 2.45 GHz
• Belt conveyors
• Roller conveyors
• Robotic handlers

Vesta is a platform unit which can be customized to suit Stand alone, inline or batch plasma applications. It has a multiple loading/unloading system which can be integrated. Products can be conveyed in the process chamber by conveyor, indexers or handling robots.The plasma chamber is equipped with a door to allow loading of the products. Once in the chamber, the products are brought to vacuum in a few seconds, process gas is inserted and plasma is activated. Once the plasma time has expired, the chamber is vented and the products are sent to the machine’s output where they can be reinserted inline, in a cassette or in a magazine.

This system is suitable for medium pressure plasma processes in the range of 0.15 to 0.9 mbar and can operate with the following gases:

• AR/H2 95/5 %
• N2/H2 95/5 %
• AR/O2 in various mix ranges
• O2
• Ar
• Other gases at request