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AEON - HP

High Power - Batch Plasma System

Applications

  • Application 1

  • Application 2

  • Application 3

Specifications

Machine type

High-power table-top batch plasma cleaner

Footprint

Plasma chamber configuration

1 powered electrode and 1 ground electrode, multiple height positions

Max product size

Min product size

Plasma generator

600W RF Generator 13.56 MHz
Automatic tuning system

Gas Lines

2x Process gas lines with Mass Flow Controller
1x Purge line

Pumping system

Dry vacuum pump 250 L/min

Controller

Win10 LTSC PC with fieldbus
16" Touchscreen
Proprietary SCI software

Facilities

Single phase 110-240V 50/60 Hz, 2.5KVA
CDA 5 to 6 bar
Process gas pressure 0.5 to 1.5 bar
Exhaust port 25 mm OD

Certifications

CE, S2, S8, Cleanroom ISO7 (10k)

Options

Kit for using pure hydrogen and hydrogen generator

Compare SCI Systems

Category

High Power

High Power

-

Machine type

High-power table-top batch plasma cleaner

-

-

Footprint

-

-

-

Plasma chamber configuration

1 powered electrode and 1 ground electrode, multiple height positions

-

-

Max product size

-

-

-

Min product size

-

-

-

Plasma generator

600W RF Generator 13.56 MHz
Automatic tuning system

-

-

Gas lines

2x Process gas lines with Mass Flow Controller
1x Purge line

-

-

Pumping system

Dry vacuum pump 250 L/min

-

-

Controller

Win10 LTSC PC with fieldbus
16" Touchscreen
Proprietary SCI software

-

-

Facilities

Single phase 110-240V 50/60 Hz, 2.5KVA
CDA 5 to 6 bar
Process gas pressure 0.5 to 1.5 bar
Exhaust port 25 mm OD

-

-

Certifications

CE, S2, S8, Cleanroom ISO7 (10k)

-

-

Options

Kit for using pure hydrogen and hydrogen generator

-

-

Request more information

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Inline
High Power
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