top of page

ARES

Large Surface Batch Plasma System

Applications

  • Application 1

  • Application 2

  • Application 3

Specifications

Machine type

Footprint

Plasma chamber configuration

Max product size

Min product size

Plasma generator

Gas Lines

Pumping system

Controller

Facilities

Certifications

Options

Compare SCI Systems

Category

High Power

High Power

-

Machine type

-

High-power table-top batch plasma cleaner

-

Footprint

-

-

-

Plasma chamber configuration

-

1 powered electrode and 1 ground electrode, multiple height positions

-

Max product size

-

-

-

Min product size

-

-

-

Plasma generator

-

600W RF Generator 13.56 MHz
Automatic tuning system

-

Gas lines

-

2x Process gas lines with Mass Flow Controller
1x Purge line

-

Pumping system

-

Dry vacuum pump 250 L/min

-

Controller

-

Win10 LTSC PC with fieldbus
16" Touchscreen
Proprietary SCI software

-

Facilities

-

Single phase 110-240V 50/60 Hz, 2.5KVA
CDA 5 to 6 bar
Process gas pressure 0.5 to 1.5 bar
Exhaust port 25 mm OD

-

Certifications

-

CE, S2, S8, Cleanroom ISO7 (10k)

-

Options

-

Kit for using pure hydrogen and hydrogen generator

-

Request more information

I am interested in these systems:

Batch
Inline
High Power
Lead frames
Other
Request more info
bottom of page