top of page

JUNO

Batch Plasma System

Applications

  • Application 1

  • Application 2

  • Application 3

Specifications

Machine type

Standalone batch plasma cleaner

Footprint

895W x 1172L x 1978H mm

Plasma chamber configuration

4 shelves with 4 couples of powered electrode and ground electrode

Max product size

Min product size

Plasma generator

600W RF Generator 13.56 MHz
Automatic tuning system

Gas Lines

2x Process gas lines with Mass Flow Controller
1x Purge line

Pumping system

Dry vacuum pump 1000 L/min

Controller

Win10 LTSC PC with fieldbus
21" Touchscreen
Proprietary SCI software

Facilities

Single phase 110-240V 50/60 Hz, 2.5KVA
CDA 5 to 6 bar
Process gas pressure 0.5 to 1.5 bar
Exhaust port 25 mm OD

Certifications

CE, S2, S8, Cleanroom ISO7 (10k)

Options

Kit for using pure hydrogen and hydrogen generator
Dry vacuum pump 1670 L/min

Compare SCI Systems

Category

Batch

Batch

-

Machine type

Standalone batch plasma cleaner

Table-top batch plasma cleaner

-

Footprint

895W x 1172L x 1978H mm

572W x 916L x 707H mm

-

Plasma chamber configuration

4 shelves with 4 couples of powered electrode and ground electrode

4 shelves with 4 couples of powered electrode and ground electrode

-

Max product size

-

-

-

Min product size

-

-

-

Plasma generator

600W RF Generator 13.56 MHz
Automatic tuning system

300W RF Generator 13.56 MHz
Automatic tuning system

-

Gas lines

2x Process gas lines with Mass Flow Controller
1x Purge line

2x Process gas lines with Mass Flow Controller

-

Pumping system

Dry vacuum pump 1000 L/min

Dry vacuum pump 250 L/min

-

Controller

Win10 LTSC PC with fieldbus
21" Touchscreen
Proprietary SCI software

Win10 LTSC PC with fieldbus
16" Touchscreen
Proprietary SCI software

-

Facilities

Single phase 110-240V 50/60 Hz, 2.5KVA
CDA 5 to 6 bar
Process gas pressure 0.5 to 1.5 bar
Exhaust port 25 mm OD

Single phase 110-240V 50/60 Hz, 2.5KVA
Process gas pressure 0.5 to 1.5 bar
Exhaust port 25 mm OD

-

Certifications

CE, S2, S8, Cleanroom ISO7 (10k)

CE, S2, S8, Cleanroom ISO7 (10k)

-

Options

Kit for using pure hydrogen and hydrogen generator
Dry vacuum pump 1670 L/min

Kit for using pure hydrogen and hydrogen generator
Purge Line

-

Request more information

I am interested in these systems:

Batch
Inline
High Power
Lead frames
Other
Request more info
bottom of page