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QML-CI

Inline Plasma System

Applications

  • Application 1

  • Application 2

  • Application 3

Specifications

Machine type

Inline plasma cleaner

Footprint

Plasma chamber configuration

Max product size

Carrier: 300W x 320L x 60H mm (customizable)

Min product size

Carrier: 25W x 100L x 1H mm (customizable)

Plasma generator

300W RF Generator 13.56 MHz
Automatic tuning system

Gas Lines

2x Process gas lines with Mass Flow Controller

Pumping system

Dry vacuum pump 1000 L/min

Controller

Win10 LTSC PC with fieldbus
16" Touchscreen
Proprietary SCI software

Facilities

Single phase 110-240V 50/60 Hz, 2.5KVA
CDA 5 to 6 bar
Process gas pressure 0.5 to 1.5 bar
Exhaust port 25 mm OD

Certifications

CE, S2, S8, Cleanroom ISO7 (10k)

Options

Kit for using pure hydrogen and hydrogen generator
Dry vacuum pump 1670 L/min
Traceability package
ISO5 Cleanroom compatibility
Purge line

Compare SCI Systems

Category

Inline

Inline

-

Machine type

Inline plasma cleaner

Super-compact inline plasma cleaner

-

Footprint

-

-

-

Plasma chamber configuration

-

1 holder for products carrier

-

Max product size

Carrier: 300W x 320L x 60H mm (customizable)

Carrier: 200W x 300L x 35H mm (customizable)

-

Min product size

Carrier: 25W x 100L x 1H mm (customizable)

Carrier: 100W x 100L x 1H mm (customizable)

-

Plasma generator

300W RF Generator 13.56 MHz
Automatic tuning system

300W RF Generator 13.56 MHz
Automatic tuning system

-

Gas lines

2x Process gas lines with Mass Flow Controller

2x Process gas lines with Mass Flow Controller

-

Pumping system

Dry vacuum pump 1000 L/min

Dry vacuum pump 1000 L/min

-

Controller

Win10 LTSC PC with fieldbus
16" Touchscreen
Proprietary SCI software

Win10 LTSC PC with fieldbus
16" Touchscreen
Proprietary SCI software

-

Facilities

Single phase 110-240V 50/60 Hz, 2.5KVA
CDA 5 to 6 bar
Process gas pressure 0.5 to 1.5 bar
Exhaust port 25 mm OD

Single phase 110-240V 50/60 Hz, 2.5KVA
CDA 5 to 6 bar
Process gas pressure 0.5 to 1.5 bar
Exhaust port 25 mm OD

-

Certifications

CE, S2, S8, Cleanroom ISO7 (10k)

CE, S2, S8, Cleanroom ISO7 (10k)

-

Options

Kit for using pure hydrogen and hydrogen generator
Dry vacuum pump 1670 L/min
Traceability package
ISO5 Cleanroom compatibility
Purge line

Kit for using pure hydrogen and hydrogen generator
Dry vacuum pump 1670 L/min
Traceability package
ISO5 Cleanroom compatibility
Purge line

-

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