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Large Surface Batch Plasma System

Ares is a standalone batch plasma cleaning system, designed for large surface substrates or matrix trays.
Ares’ chamber is specially designed to handle high power conditions required when performing etching processes.

Product Features:
The features contained in this system allow a reliable and repeatable cycling of the plasma process for 24/7 operation.
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SCI has a dedicated engineering team that will evaluate your requirements. With our technical experience and knowledge, we are able to provide you professional solutions and customized equipment that will improve your process. If you need information that is not available on this web site, please feel free to send us your request. Our sales department will contact you.