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QML

QML Inline Plasma System


QML is a compact inline plasma cleaning system with size and performances that have no parallel in the plasma cleaner industry.

QML is suitable for handling strip form factor substrates with high throughput, up to 120 UPH*, while maintaining a small footprint.


产品功能:
QML’s product handling is included in the plasma chamber. This eliminates concerns of jammed or broken lead frames.
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