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Safety Considerations and Best Practices in Handling Plasma Systems

Ensuring the safety of personnel and equipment during plasma cleaning procedures requires adherence to machine safety standards, including compliance with specific directives and protocols to mitigate electrical and mechanical hazards. Fortunately, the process poses minimal chemical exposure risks, as the gases used are non-toxic, and the generation of harmful by-products is avoided.

Plasma cleaning stands as a valuable solution for achieving optimal surface cleanliness and tailored material properties. In this article, we discuss types of plasma cleaning, its advantages, and safety concerns.

What is Plasma Cleaning?

Plasma cleaning is a process used to clean and modify the surfaces of various materials. It involves the use of low-pressure plasma, which is a partially ionized gas consisting of charged particles and neutral atoms or molecules.

In plasma cleaning, the material to be cleaned is placed in a vacuum chamber, and plasma is generated by applying an electric field or radio frequency energy to the gas in the chamber. This energizes the gas molecules, causing them to collide with each other and with the material's surface.

The energetic collisions in the plasma result in a number of processes that help in cleaning the surface. Firstly, reactive species such as ions, free radicals, and UV photons are generated, which can chemically react with and remove contaminants or unwanted layers from the material. These contaminants can include organic residues, oxides, grease, oils, and other impurities.

Plasma cleaning can also be used to modify the surface properties of materials. By selecting appropriate gases and process parameters, it is possible to introduce functional groups or create surface roughness, which can improve adhesion, wettability, or other desired characteristics of the material.

One of the advantages of plasma cleaning is that it can be performed at low temperatures, reducing the risk of damaging heat-sensitive materials. It is widely used in various industries, including semiconductor manufacturing, electronics, optics, medical devices, and aerospace, where the cleanliness and surface properties of materials are crucial for optimal performance.

Safety Considerations in Plasma Cleaning

When handling plasma cleaning systems, it is important to prioritize safety considerations and follow best practices to ensure the well-being of personnel and the proper functioning of the equipment. Operators should receive thorough training on the operation, maintenance, and safety procedures of the plasma cleaning system.

Machine Safety Standards

When it comes to ensuring lab safety with plasma cleaning, adherence to specific safety standards is crucial. These standards include the EEC Machinery Directive 2006/42/EC, EEC EMC Directive 2014/30/EC, ISO12100 Safety of Machinery, and EN 60204-1:2018 Safety of Machinery. Compliance with these standards guarantees that the plasma cleaning machine is safe for operators to use.

The risks associated with plasma cleaning primarily involve electrical and mechanical hazards. Electrical hazards arise from the potential exposure to live terminals carrying high voltage (220V, 50/60Hz) or the RF line (13.56 MHz) responsible for activating the plasma. To mitigate these risks, proper precautions must be taken to prevent unauthorized access to these hazardous components.

To maintain safety during maintenance operations, protocols are established, often by our customers, to outline the sequence of steps required to place the machine in a safe state before accessing it. These protocols aim to minimize potential risks and ensure the well-being of those performing maintenance tasks.

Mechanical hazards pertain to the potential for individuals to have their hands or body parts crushed by moving objects within the machine. As a safety measure, the design of the machine ensures that moving parts are de-energized when the machine is opened, preventing accidental injuries.

Fortunately, the plasma cleaning process does not pose significant chemical exposure risks. The gases used in the plasma cleaning processes are non-toxic, and the process itself does not generate harmful by-products. Consequently, the potential for chemical-related hazards is minimal.

Advantages of Plasma Cleaning

There are numerous benefits of Plasma Cleaning:


Plasma cleaning offers a level of selectivity that makes it a versatile and precise cleaning method. By carefully choosing the gases and process parameters, it is possible to selectively target specific contaminants or materials without damaging the underlying substrate. This selectivity is particularly advantageous when dealing with complex structures or delicate materials. For example, in the semiconductor industry, plasma cleaning can remove photoresist residues from silicon wafers while leaving the sensitive underlying layers intact.

Effective Contaminant Removal

One of the primary advantages of plasma cleaning is its effectiveness in removing contaminants from surfaces. The energetic collisions that occur in the plasma generate reactive species such as ions, free radicals, and UV photons. These species chemically react with contaminants, breaking them down and removing them from the surface.

This makes plasma cleaning highly efficient in eliminating various types of contaminants, including organic residues, oxides, grease, oils, and particulate matter. As a result, it is a valuable technique in industries where cleanliness is critical, such as semiconductor manufacturing, electronics, and medical device production.


Another significant advantage of plasma cleaning is its non-destructive nature. The process can be carried out at relatively low temperatures, reducing the risk of thermal damage to heat-sensitive materials. This is particularly crucial when cleaning or treating delicate components, such as optical lenses, polymers, or biological samples.

The ability to perform cleaning without compromising the integrity or functionality of the material is highly beneficial in maintaining the quality and performance of the treated surfaces.

Compatibility and Versatility

Plasma cleaning is compatible with a broad range of materials, including metals, ceramics, polymers, glass, and semiconductors. It can be applied to both rigid and flexible substrates, making it suitable for diverse applications. Additionally, plasma cleaning can be easily integrated into existing manufacturing processes. It can be performed in vacuum chambers or through remote plasma sources, allowing for in-line or batch processing, depending on the specific requirements.

The versatility and compatibility of plasma cleaning make it an attractive choice for various industries seeking effective surface cleaning and modification solutions.

Surface Modification

In addition to its cleaning capabilities, plasma treatment can also modify the surface properties of materials. By selecting specific gases and adjusting process conditions, it is possible to introduce functional groups or create surface roughness. This opens up possibilities for enhancing various surface characteristics, such as adhesion, wettability, biocompatibility, and optical properties.

Plasma treatment can be used to activate surfaces prior to bonding or coating processes, improving the adhesion of subsequent layers. It can also be employed to make surfaces hydrophilic or hydrophobic, depending on the desired application. The ability to modify surface properties through plasma cleaning provides additional flexibility and value in a wide range of industries.

Types of Plasma Cleaning

There are several different types of Plasma cleaning, we list just a few below.

Low-Pressure Plasma Cleaning

This is the most common form of plasma cleaning, where a low-pressure plasma is generated in a vacuum chamber. The low-pressure environment allows for a controlled and stable plasma to be formed. It is effective in removing contaminants and oxides from various materials, including metals, semiconductors, ceramics, and glass.

Atmospheric Pressure Plasma Cleaning

Unlike low-pressure plasma cleaning, atmospheric-pressure plasma cleaning operates at or near atmospheric pressure. It eliminates the need for a vacuum chamber, making it more convenient and cost-effective for certain applications. Atmospheric pressure plasma can be generated using various techniques, such as dielectric barrier discharge or atmospheric pressure glow discharge. It is often used for surface cleaning and activation of materials like polymers, textiles, and medical devices.

Remote Plasma Cleaning (Downstream Plasma)

Remote plasma cleaning involves using a separate plasma source that is physically separated from the material being cleaned. The plasma is generated in a remote chamber and then directed toward the material through a conduit or gas flow. This technique is particularly useful when dealing with temperature-sensitive materials or complex geometries where direct plasma exposure may cause damage.

Plasma Etching

Plasma etching is a specialized form of plasma cleaning that focuses on material removal rather than just surface cleaning. It is commonly used in the semiconductor industry for precise pattern transfer and selective removal of layers. Plasma etching involves using reactive species in the plasma to chemically react with and remove specific materials or layers from a substrate.

Plasma Cleaning and You

In conclusion, plasma cleaning is a powerful technique that offers efficient surface cleaning and modification capabilities. Its ability to selectively remove contaminants while preserving the integrity of underlying materials makes it an ideal choice for industries requiring precise cleaning processes. With compliance with machine safety standards and protocols, operators can ensure a safe working environment.

SCI Plasma is a highly regarded organization comprised of a team of seasoned experts who possess specialized knowledge in the field of plasma cleaning solutions. Their wealth of expertise and extensive experience make them invaluable assets for individuals or organizations seeking guidance in the realm of plasma cleaning.

Whether you have inquiries about the intricacies of the plasma cleaning process, require assistance in selecting the most suitable equipment, or need a customized solution tailored to your unique cleaning needs, the knowledgeable professionals at SCI Plasma are devoted to providing the assistance you seek. Contact us today and let’s see where we can help.



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