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AEON

Table-Top Batch Plasma System

Applications

Aeon is a high-performance, table-top batch plasma cleaning system which has been designed to deliver consistent results in a manufacturing environment. In manufacturing is typically used for:

  • Plasma cleaning before wire-bonding on modules

  • Plasma cleaning before transfer molding on modules

  • Plasma cleaning before under-fill

  • Plasma cleaning on PCBs, BGA substrates


Give its simple shelves design, it can also be used effectively for laboratory applications such as:

  • Plasma cleaning of generic parts for surface cleaning and activation for organic contamination removal

  • Plasma cleaning before coating processes (PVD, CVD, electroplating, Atomic Layer Deposition (ALD), dip coating, spin coating...)

  • Plasma cleaning before paint application

  • Plasma activation and functionalization of plastic materials (PE, PP, PDMS...)

  • Thin-layer oxide removal on metal parts


Aeon's versatility extends to a wide range of applications within the Semiconductors, Automotive and Electronics industries.

Specifications

Machine type

Table-top batch plasma cleaner

Footprint

670W x 948L x 812H mm

Plasma chamber configuration

4 shelves with 4 couples of powered electrode and ground electrode

Max product size

350W x 325L x 217H mm

Min product size

N/A

Plasma generator

300W RF Generator 13.56 MHz
Automatic tuning system

Gas Lines

2 Process gas lines with Mass Flow Controller

Pumping system

Dry vacuum pump 250 L/min

Controller

Win10 LTSC PC with fieldbus
16" Touchscreen
Proprietary SCI software

Facilities

Single phase 110-240V 50/60 Hz, 2.5KVA
CDA 5 to 6 bar
Process gas pressure 0.5 to 1.5 bar
Exhaust port 25 mm OD

Certifications

CE, S2, S8, Cleanroom ISO7 (10k)

Options

Purge line
600 W RF Generator
600 L/min dry vacuum pump (external)
Kit for using pure hydrogen and hydrogen generator

Compare SCI Systems

Category

Batch

Batch

Batch

Machine type

Table-top batch plasma cleaner

Standalone batch plasma cleaner or desmearing system

Standalone batch plasma cleaner

Footprint

670W x 948L x 812H mm

1503W x 1820L x 2101H mm

905W x 1154L x 1782H mm

Plasma chamber configuration

4 shelves with 4 couples of powered electrode and ground electrode

4 shelves with 4 couples of powered electrode and ground electrode OR 4 holders for PCB desmearing

4 shelves with 4 couples of powered electrode and ground electrode

Max product size

350W x 325L x 217H mm

500W X 520L X 625H mm

393W x 354L x 382H mm

Min product size

N/A

N/A

N/A

Plasma generator

300W RF Generator 13.56 MHz
Automatic tuning system

600W RF Generator 13.56 MHz
Automatic tuning system or
5kW generator at 40 kHz

600W RF Generator 13.56 MHz
Automatic tuning system

Gas lines

2 Process gas lines with Mass Flow Controller

2 Process gas lines with Mass Flow Controller
1 Purge line

2 Process gas lines with Mass Flow Controller
1 Purge line

Pumping system

Dry vacuum pump 250 L/min

Dry vacuum pump 1670 L/min or
Dry vacuum pump 1830 L/min plus booster pump at 8400 L/min

Dry vacuum pump 1000 L/min

Controller

Win10 LTSC PC with fieldbus
16" Touchscreen
Proprietary SCI software

Win10 LTSC PC with fieldbus
21" Touchscreen
Proprietary SCI software

Win10 LTSC PC with fieldbus
21" Touchscreen
Proprietary SCI software

Facilities

Single phase 110-240V 50/60 Hz, 2.5KVA
CDA 5 to 6 bar
Process gas pressure 0.5 to 1.5 bar
Exhaust port 25 mm OD

Single phase 110-240V 50/60 Hz
CDA 5 to 6 bar
Process gas pressure 0.5 to 1.5 bar
Exhaust port 40 mm OD

Single phase 110-240V 50/60 Hz, 2.5KVA
CDA 5 to 6 bar
Process gas pressure 0.5 to 1.5 bar
Exhaust port 25 mm OD

Certifications

CE, S2, S8, Cleanroom ISO7 (10k)

CE, S2, S8, Cleanroom ISO7 (10k)

CE, S2, S8, Cleanroom ISO7 (10k)

Options

Purge line
600 W RF Generator
600 L/min dry vacuum pump (external)
Kit for using pure hydrogen and hydrogen generator

Dry vacuum pump 5000 L/min
Kit for using pure hydrogen and hydrogen generator

Kit for using pure hydrogen and hydrogen generator
Dry vacuum pump 1670 L/min

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