ARES
Large Surface Batch Plasma System
Specifications
Machine type
High-power standalone batch plasma cleaner
Footprint
1138W x 1811L x 1469H mm
Plasma chamber configuration
1 large holder
Max product size
420W X 430L X 40 mm
Min product size
N/A
Plasma generator
600W RF Generator 13.56 MHz
Automatic tuning system
Gas Lines
2 Process gas lines with Mass Flow Controller
1 Purge line
Pumping system
Dry vacuum pump 1000 L/min
Controller
Win10 LTSC PC with fieldbus
21" Touchscreen
Proprietary SCI software
Facilities
Single phase 110-240V 50/60 Hz
CDA 5 to 6 bar
Process gas pressure 0.5 to 1.5 bar
Exhaust port 25 mm OD
Certifications
CE, S2, S8, Cleanroom ISO7 (10k)
Options
Kit for using pure hydrogen and hydrogen generator
Dry vacuum pump 1670 L/min
Compare SCI Systems
Category
High Power
High Power
-
Machine type
High-power standalone batch plasma cleaner
High-power table-top batch plasma cleaner
-
Footprint
1138W x 1811L x 1469H mm
575W x 936L x 862H mm
-
Plasma chamber configuration
1 large holder
1 powered electrode and 1 ground electrode, multiple height positions
-
Max product size
420W X 430L X 40 mm
294W x 327L X 84H mm
-
Min product size
N/A
N/A
-
Plasma generator
600W RF Generator 13.56 MHz
Automatic tuning system
600W RF Generator 13.56 MHz
Automatic tuning system
-
Gas lines
2 Process gas lines with Mass Flow Controller
1 Purge line
2 Process gas lines with Mass Flow Controller
-
Pumping system
Dry vacuum pump 1000 L/min
Dry vacuum pump 250 L/min
-
Controller
Win10 LTSC PC with fieldbus
21" Touchscreen
Proprietary SCI software
Win10 LTSC PC with fieldbus
16" Touchscreen
Proprietary SCI software
-
Facilities
Single phase 110-240V 50/60 Hz
CDA 5 to 6 bar
Process gas pressure 0.5 to 1.5 bar
Exhaust port 25 mm OD
Single phase 110-240V 50/60 Hz, 2.5KVA
CDA 5 to 6 bar
Process gas pressure 0.5 to 1.5 bar
Exhaust port 25 mm OD
-
Certifications
CE, S2, S8, Cleanroom ISO7 (10k)
CE, S2, S8, Cleanroom ISO7 (10k)
-
Options
Kit for using pure hydrogen and hydrogen generator
Dry vacuum pump 1670 L/min
Purge line
600 L/min dry vacuum pump
Kit for using pure hydrogen and hydrogen generator
-