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ATLAS

Standalone batch plasma cleaner for bulky products or plasma desmearing system

Applications

Atlas is a flexible, standalone batch plasma cleaning system. It can be used consistently in a manufacturing environment to clean and activate the surface of oddly shaped parts.


Atlas is the big brother of the Juno system and can process much bigger products. Its plasma chamber design also includes simple shelves that can be arranged at different heights to allow multiple products sizes. Each shelf can be either:

  • connected to the RF signal to deliver a RIE (Reactive Ion Etching) plasma process or,

  • grounded to deliver a PE (Plasma Etching) plasma process

This allows to carefully select the plasma energy levels and treat sensitive products.

Atlas has a specific gas distribution system that allows optimal gas flow and plasma reach inside complex geometries that may occur in the products to be treated.


Atlas is typically used for:

  • Plasma cleaning before wire-bonding on modules

  • Plasma cleaning before transfer molding on modules

  • Plasma cleaning before under-fill 

  • Plasma cleaning on PCBs, BGA substrates



Atlas's versatility extends to a wide range of applications within the Semiconductors, Automotive and Electronics industries.

Specifications

Machine type

Standalone batch plasma cleaner or desmearing system

Footprint

1503W x 1820L x 2101H mm

Plasma chamber configuration

4 shelves with 4 couples of powered electrode and ground electrode OR 4 holders for PCB desmearing

Max product size

500W X 520L X 625H mm

Min product size

N/A

Plasma generator

600W RF Generator 13.56 MHz
Automatic tuning system or
5kW generator at 40 kHz

Gas Lines

2 Process gas lines with Mass Flow Controller
1 Purge line

Pumping system

Dry vacuum pump 1670 L/min or
Dry vacuum pump 1830 L/min plus booster pump at 8400 L/min

Controller

Win10 LTSC PC with fieldbus
21" Touchscreen
Proprietary SCI software

Facilities

Single phase 110-240V 50/60 Hz
CDA 5 to 6 bar
Process gas pressure 0.5 to 1.5 bar
Exhaust port 40 mm OD

Certifications

CE, S2, S8, Cleanroom ISO7 (10k)

Options

Dry vacuum pump 5000 L/min
Kit for using pure hydrogen and hydrogen generator

Compare SCI Systems

Category

Batch

Batch

Batch

Machine type

Standalone batch plasma cleaner or desmearing system

Table-top batch plasma cleaner

Standalone batch plasma cleaner

Footprint

1503W x 1820L x 2101H mm

670W x 948L x 812H mm

905W x 1154L x 1782H mm

Plasma chamber configuration

4 shelves with 4 couples of powered electrode and ground electrode OR 4 holders for PCB desmearing

4 shelves with 4 couples of powered electrode and ground electrode

4 shelves with 4 couples of powered electrode and ground electrode

Max product size

500W X 520L X 625H mm

350W x 325L x 217H mm

393W x 354L x 382H mm

Min product size

N/A

N/A

N/A

Plasma generator

600W RF Generator 13.56 MHz
Automatic tuning system or
5kW generator at 40 kHz

300W RF Generator 13.56 MHz
Automatic tuning system

600W RF Generator 13.56 MHz
Automatic tuning system

Gas lines

2 Process gas lines with Mass Flow Controller
1 Purge line

2 Process gas lines with Mass Flow Controller

2 Process gas lines with Mass Flow Controller
1 Purge line

Pumping system

Dry vacuum pump 1670 L/min or
Dry vacuum pump 1830 L/min plus booster pump at 8400 L/min

Dry vacuum pump 250 L/min

Dry vacuum pump 1000 L/min

Controller

Win10 LTSC PC with fieldbus
21" Touchscreen
Proprietary SCI software

Win10 LTSC PC with fieldbus
16" Touchscreen
Proprietary SCI software

Win10 LTSC PC with fieldbus
21" Touchscreen
Proprietary SCI software

Facilities

Single phase 110-240V 50/60 Hz
CDA 5 to 6 bar
Process gas pressure 0.5 to 1.5 bar
Exhaust port 40 mm OD

Single phase 110-240V 50/60 Hz, 2.5KVA
CDA 5 to 6 bar
Process gas pressure 0.5 to 1.5 bar
Exhaust port 25 mm OD

Single phase 110-240V 50/60 Hz, 2.5KVA
CDA 5 to 6 bar
Process gas pressure 0.5 to 1.5 bar
Exhaust port 25 mm OD

Certifications

CE, S2, S8, Cleanroom ISO7 (10k)

CE, S2, S8, Cleanroom ISO7 (10k)

CE, S2, S8, Cleanroom ISO7 (10k)

Options

Dry vacuum pump 5000 L/min
Kit for using pure hydrogen and hydrogen generator

Purge line
600 W RF Generator
600 L/min dry vacuum pump (external)
Kit for using pure hydrogen and hydrogen generator

Kit for using pure hydrogen and hydrogen generator
Dry vacuum pump 1670 L/min

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