top of page

QML-CI

Inline Plasma System

Applications

QML-CI is a well-tested inline plasma cleaning system which has been designed to sustain all the demands of a 24/7 continuous inline production environment.


The first QML-CI system was delivered in 2015 with the purpose consistent results in a manufacturing environment. In manufacturing QML-CI is typically used for:

  • Plasma cleaning before wire-bonding on modules

  • Plasma cleaning before transfer molding on modules


  • Plasma cleaning on PCBs, BGA substrates



QML-CI has been used in a range of applications within the Semiconductors and Automotive industries, this applications span from the cleaning and activation of power modules, IGBTs and power MOSFETs.


QML-CI main advantage is its Conveyor-Indexer system which allows the loading and unloading of the plasma chamber in one movement, highly increasing its throughput.

Advanced traceability options are available on this system to easily integrate with a variety of Manufacturing Execution Systems (MES).

Specifications

Machine type

Inline plasma cleaner

Footprint

1462W x 1255L x 1514H mm

Plasma chamber configuration

Two tracks for products carrier

Max product size

Carrier: 200W x 300L x 30H mm (customizable)

Min product size

Carrier: 25W x 100L x 1H mm (customizable)

Plasma generator

300W RF Generator 13.56 MHz
Automatic tuning system

Gas Lines

2 Process gas lines with Mass Flow Controller

Pumping system

Dry vacuum pump 1000 L/min

Controller

Win10 LTSC PC with fieldbus
16" Touchscreen
Proprietary SCI software

Facilities

Single phase 110-240V 50/60 Hz, 2.5KVA
CDA 5 to 6 bar
Process gas pressure 0.5 to 1.5 bar
Exhaust port 25 mm OD

Certifications

CE, S2, S8, Cleanroom ISO7 (10k)

Options

Kit for using pure hydrogen and hydrogen generator
Dry vacuum pump 1670 L/min
Traceability package
ISO5 (100) Cleanroom compatibility
Purge line

Compare SCI Systems

Category

Inline

Inline

-

Machine type

Inline plasma cleaner

Super-compact inline plasma cleaner

-

Footprint

1462W x 1255L x 1514H mm

478W x 1580L x 1727H mm

-

Plasma chamber configuration

Two tracks for products carrier

1 holder for products carrier

-

Max product size

Carrier: 200W x 300L x 30H mm (customizable)

Carrier: 200W x 300L x 25H mm (customizable)

-

Min product size

Carrier: 25W x 100L x 1H mm (customizable)

Carrier: 40W x 100L x 1H mm (customizable)

-

Plasma generator

300W RF Generator 13.56 MHz
Automatic tuning system

300W RF Generator 13.56 MHz
Automatic tuning system

-

Gas lines

2 Process gas lines with Mass Flow Controller

2 Process gas lines with Mass Flow Controller

-

Pumping system

Dry vacuum pump 1000 L/min

Dry vacuum pump 1000 L/min

-

Controller

Win10 LTSC PC with fieldbus
16" Touchscreen
Proprietary SCI software

Win10 LTSC PC with fieldbus
16" Touchscreen
Proprietary SCI software

-

Facilities

Single phase 110-240V 50/60 Hz, 2.5KVA
CDA 5 to 6 bar
Process gas pressure 0.5 to 1.5 bar
Exhaust port 25 mm OD

Single phase 110-240V 50/60 Hz, 2.5KVA
CDA 5 to 6 bar
Process gas pressure 0.5 to 1.5 bar
Exhaust port 25 mm OD

-

Certifications

CE, S2, S8, Cleanroom ISO7 (10k)

CE, S2, S8, Cleanroom ISO7 (10k)

-

Options

Kit for using pure hydrogen and hydrogen generator
Dry vacuum pump 1670 L/min
Traceability package
ISO5 (100) Cleanroom compatibility
Purge line

Kit for using pure hydrogen and hydrogen generator
Dry vacuum pump 1670 L/min
Traceability package
ISO5 (100) Cleanroom compatibility
Purge line

-

Request more information

I am interested in these systems:

Batch
Inline
High Power
Lead frames
Other
Request more info
bottom of page